Title

마그네트론 스퍼터링 장치

Alternative Title

MAGNETRON SPUTTER DEVICE

Country

US

Application Date

2023-10-18

Application No.

18/287,318

Registration Date

2025-04-01

Publication No.

12,266,516

Assignee

(재)대구경북과학기술원(100/100)

URI

http://hdl.handle.net/20.500.11750/58341 18/287,318

Show Full Item Record