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Metadata Downloads
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김준우 | - |
| dc.contributor.author | 김준서 | - |
| dc.date.accessioned | 2025-07-28T11:10:12Z | - |
| dc.date.available | 2025-07-28T11:10:12Z | - |
| dc.identifier.uri | https://scholar.dgist.ac.kr/handle/20.500.11750/58732 | - |
| dc.description.abstract | An embodiment of the present invention provides a substrate-processing device comprising: an outer housing that forms the exterior; an inner housing that is inserted into the interior of the outer housing to be rotated relative to the outer housing and includes a mounting unit on which an object to be processed is mounted; a sputter unit disposed in the outer housing to form a thin film on the surface of the object to be processed; and a drive unit for providing a driving force that enables the inner housing to rotate, wherein the mounting unit has recesses arranged on the outer circumferential surface of the inner housing toward the center thereof. | - |
| dc.title | SUBSTRATE-PROCESSING DEVICE | - |
| dc.title.alternative | Apparatus for processing substrate | - |
| dc.type | Patent | - |
| dc.publisher.country | UN | - |
| dc.identifier.patentApplicationNumber | PCT/KR2024/007323 | - |
| dc.date.application | 2024-05-29 | - |
| dc.identifier.patentRegistrationNumber | 2024248477 | - |
| dc.date.registration | 2024-12-05 | - |
| dc.contributor.assignee | DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY,재단법인대구경북과학기술원 | - |
| dc.type.iprs | 특허 | - |
