Programmable MZI Based on Si Photonic MEMS Tunable Delay Line

Abstract

We report on a programmable MZI based on Si photonic MEMS. The device can tune FSR (0.062-0.524 nm) as well as extinction ratio (1-16 dB). Static power consumption is less than 16 nW. © 2022 The Author(s) © IEEE 2022.