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Enhancing Crystal Orientation Control in Monolithic 3D Upper-Channel Layers through Laser Crystallization

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Title
Enhancing Crystal Orientation Control in Monolithic 3D Upper-Channel Layers through Laser Crystallization
Alternative Title
레이저 결정화 기반 모노리식 3D 상부 채널층의 결정 배향 정밀 제어
DGIST Authors
Jiwoo WonHyuk-Jun KwonJae Eun Jang
Advisor
권혁준
Co-Advisor(s)
Jae Eun Jang
Issued Date
2025
Awarded Date
2025-08-01
Type
Thesis
Description
Monolithic 3D Integration, Seedless Laser Crystallization, Crystal Orientation Control, Photon Flux Engineering, Thermal Management
URI
https://scholar.dgist.ac.kr/handle/20.500.11750/59838
http://dgist.dcollection.net/common/orgView/200000891280
DOI
10.22677/THESIS.200000891280
Degree
Master
Department
Department of Electrical Engineering and Computer Science
Publisher
DGIST
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