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Characterization of a Piezoelectric AlN Beam Array in Air and Fluid for an Artificial Basilar Membrane

Title
Characterization of a Piezoelectric AlN Beam Array in Air and Fluid for an Artificial Basilar Membrane
Authors
Jeon, Hye JinJang, Jong MoonKim, Sang WonChoi, Hong Soo
DGIST Authors
Choi, Hong Soo
Issue Date
2018-03
Citation
Electronic Materials Letters, 14(2), 101-111
Type
Article
Article Type
Article
Author Keywords
Artificial basilar membrane (ABM)PiezoelectricAlNFrequency selectivityXeF2 dry etchingResidual stress
Keywords
FREQUENCY-SELECTIVITYCOCHLEAR IMPLANTSACOUSTIC SENSORMODEL
ISSN
1738-8090
Abstract
In this study, we present a piezoelectric artificial basilar membrane (ABM) composed of a 10-channel aluminum nitride beam array. Each beam varies in length from 1306 to 3194 μm for mimicking the frequency selectivity of the cochlea. To characterize the frequency selectivity of the ABM, we measured the mechanical displacement and piezoelectric output while applying acoustic stimulus at 100 dB sound pressure level in the range of 500 Hz–40 kHz. The resonance frequencies measured by mechanical displacement and piezoelectric output were in the range of 10.56–36.5 and 10.9–37.0 kHz, respectively. In addition, the electrical stimulus was applied to the ABMs to compare the mechanical responses in air and fluid. The measured resonance frequencies were in the range of 11.1–47.7 kHz in the air and 3.10–11.9 kHz in the fluid. Understanding the characteristics of the ABM is important for its potential use as a key technology for auditory prostheses. Graphical Abstract: [Figure not available: see fulltext.]. © 2018, The Korean Institute of Metals and Materials.
URI
http://hdl.handle.net/20.500.11750/6213
DOI
10.1007/s13391-018-0012-7
Publisher
KOREAN INST METALS MATERIALS
Related Researcher
  • Author Choi, Hongsoo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
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Collection:
Department of Robotics EngineeringBio-Micro Robotics Lab1. Journal Articles


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