Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Kang, Woo Jin | - |
dc.contributor.author | Jung, Joon Taek | - |
dc.contributor.author | Lee, Won Jun | - |
dc.contributor.author | Ryu, Jungho | - |
dc.contributor.author | Choi, Hong Soo | - |
dc.date.accessioned | 2018-05-25T02:25:57Z | - |
dc.date.available | 2018-05-25T02:25:57Z | - |
dc.date.created | 2018-05-14 | - |
dc.date.issued | 2018-07 | - |
dc.identifier.issn | 0960-1317 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/6390 | - |
dc.description.abstract | Micro-electromechanical system (MEMS) technologies were used to develop a thickness-mode piezoelectric micromachined ultrasonic transducer (Tm-pMUT) annular array utilizing a lead magnesium niobate-lead zirconate titanate (PMN-PZT) single crystal prepared by the solid-state single-crystal-growth method. Dicing is a conventional processing method for PMN-PZT single crystals, but MEMS technology can be adopted for the development of Tm-pMUT annular arrays and has various advantages, including fabrication reliability, repeatability, and a curved element shape. An inductively coupled plasma-reactive ion etching process was used to etch a brittle PMN-PZT single crystal selectively. Using this process, eight ring-shaped elements were realized in an area of 1 × 1 cm2. The resonance frequency and effective electromechanical coupling coefficient of the Tm-pMUT annular array were 2.66 (±0.04) MHz, 3.18 (±0.03) MHz, and 30.05%, respectively, in the air. The maximum positive acoustic pressure in water, measured at a distance of 7.27 mm, was 40 kPa from the Tm-pMUT annular array driven by a 10 Vpp sine wave at 2.66 MHz without beamforming. The proposed Tm-pMUT annular array using a PMN-PZT single crystal has the potential for various applications, such as a fingerprint sensor, and for ultrasonic cell stimulation and low-intensity tissue stimulation. © 2018 IOP Publishing Ltd. | - |
dc.language | English | - |
dc.publisher | Institute of Physics Publishing | - |
dc.title | A thickness-mode piezoelectric micromachined ultrasound transducer annular array using a PMN-PZT single crystal | - |
dc.type | Article | - |
dc.identifier.doi | 10.1088/1361-6439/aab9d4 | - |
dc.identifier.scopusid | 2-s2.0-85047413765 | - |
dc.identifier.bibliographicCitation | Journal of Micromechanics and Microengineering, v.28, no.7 | - |
dc.description.isOpenAccess | FALSE | - |
dc.subject.keywordAuthor | ultrasonic transducer | - |
dc.subject.keywordAuthor | pMUT | - |
dc.subject.keywordAuthor | PMN-PZT single crystal | - |
dc.subject.keywordAuthor | piezoelectric MEMS | - |
dc.subject.keywordAuthor | annular array | - |
dc.subject.keywordPlus | HIGH-FREQUENCY | - |
dc.subject.keywordPlus | ETCHING CHARACTERISTICS | - |
dc.subject.keywordPlus | PHOTOELECTRON-SPECTRA | - |
dc.subject.keywordPlus | FILMS | - |
dc.subject.keywordPlus | THIN | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | MECHANISM | - |
dc.subject.keywordPlus | BEHAVIOR | - |
dc.subject.keywordPlus | PLASMAS | - |
dc.citation.number | 7 | - |
dc.citation.title | Journal of Micromechanics and Microengineering | - |
dc.citation.volume | 28 | - |
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