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Synthesis mechanism of MoS2 layered crystals by chemical vapor deposition using MoO3 and sulfur powders

Title
Synthesis mechanism of MoS2 layered crystals by chemical vapor deposition using MoO3 and sulfur powders
Authors
Hyun, Cheol-MinChoi, Jeong-HunLee, Seung WonPark, Jeong HwaLee, Kang-TaekAhn, Ji-Hoon
DGIST Authors
Lee, Kang-Taek
Issue Date
2018-10
Citation
Journal of Alloys and Compounds, 765, 380-384
Type
Article
Article Type
Article
Author Keywords
Crystal growthMoS2Chemical vapor depositionGrowth mechanism2-Dimensional materials
Keywords
MONOLAYER MOS2TRANSISTORSEVOLUTION
ISSN
0925-8388
Abstract
Monolayer MoS2 layered crystals have attracted significant attention owing to their potential applicability in emerging devices, and chemical vapor deposition (CVD) is the best method so far to obtain monolayer MoS2 single crystals. Although many studies have been published on MoS2 monolayer crystals grown by CVD, there is a lack of understanding of its synthesis pathway. Therefore, in this paper, we studied the mechanism of the synthesis pathway when monolayer MoS2 crystals are synthesized by conventional CVD using MoO3 and sulfur powders. It was found that solid MoO2 produced by the reduction of MoO3 by sulfur plays a very important role in the synthesis of MoS2 layered crystals as an intermediate phase. © 2018 Elsevier B.V.
URI
http://hdl.handle.net/20.500.11750/9010
DOI
10.1016/j.jallcom.2018.06.183
Publisher
Elsevier Ltd
Files:
There are no files associated with this item.
Collection:
Department of Energy Science and EngineeringAECSL(Advanced Energy Conversion and Storage Lab)1. Journal Articles


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