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Article
Determination of Dimension and Conformal Arsenic Doping Profile of a Fin Field Effect Transistors by Time-of-Flight Medium Energy Ion Scattering
  • Min, Won Ja ; 
  • Kim, Jwasoon ; 
  • Park, Kyungsu ; 
  • Marmitt, Gabriel ; 
  • England, Jonathan ; 
  • Moon, DaeWon
  • 2019-07
  • Min, Won Ja. (2019-07). Determination of Dimension and Conformal Arsenic Doping Profile of a Fin Field Effect Transistors by Time-of-Flight Medium Energy Ion Scattering. doi: 10.1021/acs.analchem.9b02687
  • American Chemical Society
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Article
Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO 2 /SiO 2 /Si films
  • Min, Won Ja ; 
  • Marmitt, Gabriel ; 
  • Grande, Pedro L. ; 
  • Moon, DaeWon
  • 2019-07
  • Min, Won Ja. (2019-07). Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO 2 /SiO 2 /Si films. doi: 10.1002/sia.6642
  • John Wiley & Sons Inc.
  • View : 547
  • Download : 0
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