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Recent advances in MEIS

Title
Recent advances in MEIS
Authors
Moon, DaeWon
DGIST Authors
Moon, DaeWon
Issue Date
2020-01
Citation
Surface and Interface Analysis, 52(1-2), 63-67
Type
Article
Article Type
Article
Keywords
ENERGY-ION-SCATTERINGGROWTHRESOLUTIONSTRAINSURFACEFILMS
ISSN
0142-2421
Abstract
In this perspective on recent advances in medium-energy ion scattering (MEIS), I focus on the current issues to make MEIS a practically powerful and useful analysis technique for nanostructured materials and devices after a brief summary of MEIS, thereby highlighting the need for an extensive review on the development of MEIS methodology and its application to a wide range of contexts. © 2019 John Wiley & Sons, Ltd.
URI
http://hdl.handle.net/20.500.11750/11019
DOI
10.1002/sia.6708
Publisher
John Wiley & Sons Inc.
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