- Title
-
Recent advances in MEIS
- Issued Date
-
2020-01
- Citation
-
Moon, DaeWon. (2020-01). Recent advances in MEIS. Surface and Interface Analysis, 52(1–2), 63–67. doi: 10.1002/sia.6708
- Type
-
Article
- Keywords
-
ENERGY-ION-SCATTERING
; GROWTH
; RESOLUTION
; STRAIN
; SURFACE
; FILMS
- ISSN
-
0142-2421
- Abstract
-
In this perspective on recent advances in medium-energy ion scattering (MEIS), I focus on the current issues to make MEIS a practically powerful and useful analysis technique for nanostructured materials and devices after a brief summary of MEIS, thereby highlighting the need for an extensive review on the development of MEIS methodology and its application to a wide range of contexts. © 2019 John Wiley & Sons, Ltd.
- URI
-
http://hdl.handle.net/20.500.11750/11019
- DOI
-
10.1002/sia.6708
- Publisher
-
John Wiley & Sons Inc.
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