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국소 열처리를 통한 트랜지스터 특성 복원방법

Title
국소 열처리를 통한 트랜지스터 특성 복원방법
Alternative Title
REPAIRING METHOD OF CHARACTERISTICS OF TRANSISTORS BY LOCAL HEAT TREATMENT
Author(s)
임성준이현준김준우노희연김준서
Country
CH
Application Date
2018-04-27
Application No.
10711457.8
Registration Date
2019-11-01
Publication No.
I676214
Assignee
(재)대구경북과학기술원(100/100)
URI
http://hdl.handle.net/20.500.11750/11219 10711457.8
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Division of Nanotechnology 3. Patents

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