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High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance

Title
High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance
Authors
Jang, Il RyuPark, JeonhyeongKim, Hoe Joon
DGIST Authors
Kim, Hoe Joon
Issue Date
2019-10-27
Citation
18th IEEE Sensors, SENSORS 2019, 8956841
Type
Conference
ISBN
9781728116341
ISSN
1930-0395
Abstract
This paper presents the integration of a thin film Carbon Nanotubes (CNTs) on a Quartz Crystal Microbalance (QCM) for an accurate mass sensing of in-liquid particles. Although a QCM is an economic solution for the mass sensing of solid thin films, QMCs generally become unreliable for in-liquid particles analysis due to a rather complex fluidic motions and coffee ring effect of liquid droplets. Specifically, uncontrollable agglomerations of particles hinder a stable QCM operation and ultimately limit its mass sensitivity. The introduced CNT layer induces a controllable nm-resolution roughness on QCMs, and such roughness affects the nucleation behavior of ionic particles and attachment parameters of colloids, ultimately improving the particle adhesion for a stable QCM operation. CNT-QCMs exhibits a mass sensing range of up to over 10 μg with about 40 pg measurement resolution. Moreover, CNT-QCMs maintain higher quality factor (Q) compared to the bare QCM, and such improvement in Q could directly determine the power budget and noise performances of the QCM integrated oscillators or sensor systems. We believe our work can contribute to build an advanced sensor systems for water quality monitoring, detection of metal ion concentration in semiconductor processing, and even for aerosol particle analysis. © 2019 IEEE.
URI
http://hdl.handle.net/20.500.11750/11507
DOI
10.1109/SENSORS43011.2019.8956841
Publisher
Institute of Electrical and Electronics Engineers Inc.
Related Researcher
  • Author Kim, Hoe Joon Nano Materials and Devices Lab
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
Files:
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Collection:
Department of Robotics EngineeringNano Materials and Devices Lab2. Conference Papers


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