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High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance
- High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance
- Jang, Il Ryu; Park, Jeonhyeong; Kim, Hoe Joon
- DGIST Authors
- Kim, Hoe Joon
- Issue Date
- 18th IEEE Sensors, SENSORS 2019, 8956841
- This paper presents the integration of a thin film Carbon Nanotubes (CNTs) on a Quartz Crystal Microbalance (QCM) for an accurate mass sensing of in-liquid particles. Although a QCM is an economic solution for the mass sensing of solid thin films, QMCs generally become unreliable for in-liquid particles analysis due to a rather complex fluidic motions and coffee ring effect of liquid droplets. Specifically, uncontrollable agglomerations of particles hinder a stable QCM operation and ultimately limit its mass sensitivity. The introduced CNT layer induces a controllable nm-resolution roughness on QCMs, and such roughness affects the nucleation behavior of ionic particles and attachment parameters of colloids, ultimately improving the particle adhesion for a stable QCM operation. CNT-QCMs exhibits a mass sensing range of up to over 10 μg with about 40 pg measurement resolution. Moreover, CNT-QCMs maintain higher quality factor (Q) compared to the bare QCM, and such improvement in Q could directly determine the power budget and noise performances of the QCM integrated oscillators or sensor systems. We believe our work can contribute to build an advanced sensor systems for water quality monitoring, detection of metal ion concentration in semiconductor processing, and even for aerosol particle analysis. © 2019 IEEE.
- Institute of Electrical and Electronics Engineers Inc.
- Related Researcher
Kim, Hoe Joon
Nano Materials and Devices Lab
MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
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- Department of Robotics EngineeringNano Materials and Devices Lab2. Conference Papers
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