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Issue Date	Title Author(s) Journal	View
2022-08	High and Uniform Phosphorus Doping in Germanium through a Modified Plasma Assisted Delta Doping Process with H2 Plasma Treatment Jeong, Heejae ; Kim, Y. S. ; Baik, Seunghun ; Kang, Hongki ; Jang, Jae Eun ; Kwon, Hyuk-Jun IEEE Electron Device Letters, v.43, no.8, pp.1315 - 1318, 2022-08	308

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