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Automatic Optical Inspection System with Telecentric Optics and Phase-measuring Profilometry for Highly Accurate Localization of Electronic Packages
- Title
- Automatic Optical Inspection System with Telecentric Optics and Phase-measuring Profilometry for Highly Accurate Localization of Electronic Packages
- Authors
- Lee, Hyunki; Kim, Min Young
- DGIST Authors
- Lee, Hyunki; Kim, Min Young
- Issue Date
- 2020-08
- Citation
- International Journal of Control, Automation and Systems, 18(8), 2120-2130
- Type
- Article
- Article Type
- Article
- Author Keywords
- Automated optical inspection; phase-measuring profilometry; visual inspection
- ISSN
- 1598-6446
- Abstract
- Typical visual placement inspection systems in semiconductor or electronics manufacturing industries use only highly-magnified two-dimensional imaging with controlled illumination for high accuracy. However, current semiconductor packaging technology needs more precise manufacturing processes for highly integrated semiconductor packages, in which high-precision alignment between the semiconductor die and the matched substrate is indispensable for successful electronic interconnection. To solve this problem, an advanced visual placement inspection system for 3D stacking of electronic components is proposed; it utilizes 3D profilometry and 2D telecentric optics. In addition to the introduction of the proposed system, the system calibration algorithms and the information processing algorithms for accurate positioning of the semiconductor die, as well as the implemented inspection system are described in detail. To verify the system performance, a series of real experiments on newly developed flip-chip packages for high-performance computing were performed, and the results are analyzed and discussed. © 2020, ICROS, KIEE and Springer.
- URI
- http://hdl.handle.net/20.500.11750/12051
- DOI
- 10.1007/s12555-019-0887-6
- Publisher
- Institute of Control, Robotics and Systems
- Related Researcher
-
-
Lee, HyunKi
Camera Culture Group
-
Research Interests
Machine Vision, Intelligent Robot, Design of Optical Systems
- Files:
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- Collection:
- Division of Intelligent RoboticsCamera Culture Group1. Journal Articles
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