DGIST ScholarDivision of Energy Technology3. Patents
Cited 0 time in webofscience Cited 0 time in scopus
0 219 Export

다공성 부재를 포함하는 칼코겐 증착 장치 및 칼코겐화 방법

Title
다공성 부재를 포함하는 칼코겐 증착 장치 및 칼코겐화 방법
Translated Title
CHALCOGENIDE EVAPORATION APPARATUS COMPRISING POROUS MEMBER AND CHACOGENIZATION METHOD
Inventors
이상주; 심준형; 김대환; 안광석; 양기정; 김삼미; 손대호; 김세윤; 강진규
DGIST Inventors
이상주; 심준형; 김대환; 안광석; 양기정; 김삼미; 손대호; 김세윤; 강진규
Country
KO
Application Date
2018-05-14
Application No.
10-2018-0054945
Registration Date
2020-12-18
Registration No.
10-2195281
Assignee
재단법인대구경북과학기술원
URI
http://hdl.handle.net/20.500.11750/13250
https://doi.org/10.8080/1020180054945 [KIPRIS]
Abstract
본 발명은 다공성 부재를 포함하는 칼코겐 증착 장치 및 칼코겐화 방법에 관한 것이고, 본 발명의 실시 예를 따르는 칼코겐 증착 장치는 액화된 칼코겐 소스를 수용하면서 외부 표면으로 기화된 칼코겐 소스를 방출할 수 있는 다공성 부재를 포함한다.
Related Researcher
Files:
There are no files associated with this item.
Collection:
Division of Energy Technology3. Patents
Show Full Item Record


qrcode mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

DGIST

Copyrights ⓒ 2016. Daegu Gyeongbuk Institute of Science & Technology All right reserved.

DGIST Scholar was built with support from the OAK distribution project by the National Library of Korea.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Library Services Team, DGIST 333. Techno Jungang-daero, Hyeonpung-myeon, Dalseong-gun, Daegu, 42988, Republic of Korea.

RSS_1.0 RSS_2.0 ATOM_1.0

BROWSE

LIBRARY