Division of Energy & Environmental Technology 3. Patents
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다공성 부재를 포함하는 칼코겐 증착 장치 및 칼코겐화 방법

Title
다공성 부재를 포함하는 칼코겐 증착 장치 및 칼코겐화 방법
Alternative Title
CHALCOGENIDE EVAPORATION APPARATUS COMPRISING POROUS MEMBER AND CHACOGENIZATION METHOD
Author(s)
이재백 ; 심준형 ; 김대환 ; 안광석 ; 양기정 ; 김삼미 ; 손대호 ; 김세윤 ; 강진규
Country
KO
Application Date
2018-05-14
Application No.
10-2018-0054945
Registration Date
2020-12-18
Publication No.
10-2195281
Assignee
(재)대구경북과학기술원(100/100)
URI
http://hdl.handle.net/20.500.11750/13250 10-2018-0054945
Abstract
본 발명은 다공성 부재를 포함하는 칼코겐 증착 장치 및 칼코겐화 방법에 관한 것이고, 본 발명의 실시 예를 따르는 칼코겐 증착 장치는 액화된 칼코겐 소스를 수용하면서 외부 표면으로 기화된 칼코겐 소스를 방출할 수 있는 다공성 부재를 포함한다.
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