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Transparent 3D microelectrodes with high resolution for subretinal stimulation

Transparent 3D microelectrodes with high resolution for subretinal stimulation
Kim, SoheeSeo, Hee WonKim, Namju
DGIST Authors
Kim, Sohee
Issued Date
Objective. Various microelectrodes included in retinal prosthetic devices have been developed to replace damaged retinal cells. To stimulate remaining retinal cells more effectively, we present 3D microelectrode arrays for a subretinal device.
Methods. The 3D microelectrodes were fabricated using micro-electro-mechanical system technologies. Polydimethylsiloxane (PDMS) was used as a substrate of electrodes to realize the flexible and transparent electrode array. To obtain a 3D electrode shape with high resolution, dry and wet etching processes were performed such as deep reactive ion etching and HNA etching in addition to dicing.
Results. The microelectrodes consisting of 16 pixels to 64 pixels were fabricated, supported by 150 μm-thick PDMS. The fabricated 3D microelectrodes were further assembled with an integrated circuit (IC) to stimulate retinal cells.
Discussion. Transparent 3D microelectrode arrays have been developed and 16-pixel microelectrodes have been tested to demonstrate the stimulation capacity in in-vitro subretinal setup. To evaluate the stimulation performance and biocompatibility, more experiments in in-vitro and in-vivo environments will be performed as a further study.
RWTH Aachen University
Related Researcher
  • 김소희 Kim, Sohee Department of Robotics and Mechatronics Engineering
  • Research Interests Neural interface; Brain interface; Bio MEMS; Soft MEMS; Stretchable electronics; Zebrafish electrophysiology
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Department of Robotics and Mechatronics Engineering Neural Interfaces & MicroSystems Lab 2. Conference Papers


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