Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Chou, Namsun | - |
dc.contributor.author | Moon, Hyunmin | - |
dc.contributor.author | Park, Jinhee | - |
dc.contributor.author | Kim, Sohee | - |
dc.date.accessioned | 2021-10-07T03:00:06Z | - |
dc.date.available | 2021-10-07T03:00:06Z | - |
dc.date.created | 2021-05-14 | - |
dc.date.issued | 2021-08 | - |
dc.identifier.issn | 0300-9440 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/15419 | - |
dc.description.abstract | Parylene C-modified polydimethylsiloxane (PDMS) substrates such as parylene C-deposited PDMS and parylene C-filled PDMS have been developed for the microfabrication of soft electronic devices with mechanically and electrically stable metal patterns. In previous studies, we performed oxygen plasma etching to etch parylene C away from the PDMS surface of parylene C-deposited PDMS to maximize the benefits of soft and stretchable properties of PDMS. However, the resultant parylene C-filled PDMS exhibited microcracks during thin film metal patterning as the etching time increased. In this study, to analyze this cracking phenomenon precisely, the penetration depth of parylene C into PDMS was quantitatively investigated according to the thickness of deposited parylene C, and the amount of parylene C on the surface as well as in the interfacial region formed by parylene C and PDMS was analyzed depending on the etching time. It was observed that residual parylene C remained in the PDMS pores even after parylene C was etched away from the PDMS surface. In addition, we confirmed that only the amount of parylene C on the PDMS surface was reduced by excessive etching, and parylene C inside the PDMS pores was not significantly affected. From these results, we could confirm that the optimal condition to fabricate the parylene C-filled PDMS substrate was to etch parylene C just from the surface of PDMS without over-etching. The parylene C-filled PDMS substrate would enable the wafer-scale high-yield fabrication of soft bioelectronics for diverse applications. © 2021 Elsevier B.V. | - |
dc.language | English | - |
dc.publisher | Elsevier BV | - |
dc.title | Interfacial and surface analysis of parylene C-modified PDMS substrates for soft bioelectronics | - |
dc.type | Article | - |
dc.identifier.doi | 10.1016/j.porgcoat.2021.106309 | - |
dc.identifier.wosid | 000659520800003 | - |
dc.identifier.scopusid | 2-s2.0-85104979860 | - |
dc.identifier.bibliographicCitation | Progress in Organic Coatings, v.157, pp.106309 | - |
dc.description.isOpenAccess | FALSE | - |
dc.subject.keywordAuthor | Mixed interfacial analysis | - |
dc.subject.keywordAuthor | Parylene C | - |
dc.subject.keywordAuthor | Parylene C-deposited PDMS | - |
dc.subject.keywordAuthor | Parylene C-filled PDMS | - |
dc.subject.keywordAuthor | PDMS | - |
dc.subject.keywordAuthor | Soft bioelectronics | - |
dc.subject.keywordPlus | Soft electronics | - |
dc.subject.keywordPlus | Stable metals | - |
dc.subject.keywordPlus | Polydimethylsiloxane | - |
dc.subject.keywordPlus | Substrates | - |
dc.subject.keywordPlus | Surface analysis | - |
dc.subject.keywordPlus | Soft bioelectronic | - |
dc.subject.keywordPlus | Electronics devices | - |
dc.subject.keywordPlus | Microchannels | - |
dc.subject.keywordPlus | Microcracks | - |
dc.subject.keywordPlus | Pulse width modulation | - |
dc.subject.keywordPlus | Secondary ion mass spectrometry | - |
dc.subject.keywordPlus | Silicones | - |
dc.subject.keywordPlus | Etching time | - |
dc.subject.keywordPlus | Micro-fabrication | - |
dc.subject.keywordPlus | Mixed interfacial analyse | - |
dc.subject.keywordPlus | Parylene C | - |
dc.subject.keywordPlus | Parylene C-deposited polydimethylsiloxane | - |
dc.subject.keywordPlus | Parylene C-filled polydimethylsiloxane | - |
dc.citation.startPage | 106309 | - |
dc.citation.title | Progress in Organic Coatings | - |
dc.citation.volume | 157 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry; Materials Science | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Applied; Materials Science, Coatings & Films | - |
dc.type.docType | Article | - |
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