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|Issue Date||Title Author(s) Journal||Views|
MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate
Journal of Micromechanics and Microengineering, 27(7)
31-mode piezoelectric micromachined ultrasonic transducer with PZT thick film by granule spraying in vacuum process
Applied Physics Letters, 110(21)