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2016
Characterization of an advanced MEMS artificial basilar membrane using XeF2 etching in the air and fluid
Jeon, Hye Jin
DGIST, 2016
987
1
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- Subject
AlN beam array
1
AlN 빔 어레이
1
artificial basilar membrane
1
MEMS
1
piezoelectric output voltage
1
XeF2 etching
1
공진 주파수
1
인공 기저막
1
제논 에칭
1
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