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High performance, transparent a-IGZO TFTs on a flexible thin glass substrate

Title
High performance, transparent a-IGZO TFTs on a flexible thin glass substrate
Author(s)
Lee, Gwang JunKim, JoonwooKim, Jung-HyeJeong, Soon MoonJang, Jae EunJeong, Jaewook
Issued Date
2014-03
Citation
Semiconductor Science and Technology, v.29, no.3
Type
Article
Author Keywords
a-IGZOa-InGaZnOthin-film transistorsbendingthin glass substratebias stress
ISSN
0268-1242
Abstract
We investigated electrical properties of transparent amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) with amorphous indium zinc oxide (a-IZO) transparent electrodes on a flexble thin glass substrate. The TFTs show a high field-effect mobility, a good subthreshold slope and a high on/off ratio owing to the high temperature thermal annealing process which cannot be applied to typical transparent polymer-based flexible substrates. Bias stress instability tests applying tensile stress concurrently with the bending radius of up to 40 mm indicated that mechanically and electrically stable a-IGZO TFTs can be fabricated on the transparent thin glass substrate. © 2014 IOP Publishing Ltd.
URI
http://hdl.handle.net/20.500.11750/1589
DOI
10.1088/0268-1242/29/3/035003
Publisher
Institute of Physics Publishing
Related Researcher
  • 정순문 Jeong, Soon Moon
  • Research Interests Mechanoluminescence; 기계발광; Electroluminescence; 전계발광; Display; 디스플레이; Stretchable; 스트레쳐블; Battery-free; 무전원
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Appears in Collections:
Division of Energy & Environmental Technology Soft Optoelectronic Materials Lab. 1. Journal Articles
Department of Electrical Engineering and Computer Science Advanced Electronic Devices Research Group(AEDRG) - Jang Lab. 1. Journal Articles
Division of Nanotechnology 1. Journal Articles

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