Department of Electrical Engineering and Computer Science Advanced Electronic Devices Research Group(AEDRG) - Kwon Lab. 3. Patents
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2차원 소재의 결함 생성 방법

Title
2차원 소재의 결함 생성 방법
Alternative Title
Method for generating defects of 2-dimensional material
Author(s)
권동재 ; 권혁준 ; 김준일
Country
KO
Application Date
2020-03-10
Application No.
10-2020-0029801
Registration Date
2022-02-10
Publication No.
10-2363150
Assignee
(재)대구경북과학기술원(100/100)
URI
http://hdl.handle.net/20.500.11750/16241 10-2020-0029801
Abstract
본 발명의 일 실시예는, 2차원 소재로 이루어진 대상 기판의 표면에 결함영역을 설정하는 단계, 상기 결함영역에 복수의 나노 파티클을 코팅하여 코팅막을 형성하는 단계, 상기 코팅막에 사전에 설정된 에너지를 갖는 광을 조사하여 상기 대상 기판에 결함을 형성하는 단계 및 상기 대상 기판으로부터 상기 나노 파티클을 제거하는 단계를 포함하는, 2차원 소재의 결함 생성 방법을 제공한다.
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