DGIST Scholar: Flexible Multi-electrode Neural Probe using Active Matrix Design of Transistor Array

Department of Electrical Engineering and Computer Science Theses Master

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Flexible Multi-electrode Neural Probe using Active Matrix Design of Transistor Array

Title: Flexible Multi-electrode Neural Probe using Active Matrix Design of Transistor Array

Table Of Contents: Ⅰ. Introduction 1
1.1 Motivation 1
1.2 Neural interface system 2
1.2.1 Biocompatibility 4
1.2.2 Mechanical mismatch 6
1.2.3 Electrical properties 7
1.3 Materials for neural probe 8
1.4 Electrode array 9
1.4.1 Dot array 10
1.4.2 Active matrix 10
1.4.2.1 Active matrix of 1T design 10
1.4.2.2 Active matrix of 2T design 12
1.5 IGZO TFT 13
Ⅱ. Experimental Details 15
2.1 Device structure 15
2.1.1 Electrode array 16
2.1.2 IGZO TFT 18
2.1.3 Sacrificial layer 19
2.2 Device fabrication 20
2.2.1 TFT fabrication 20
2.2.2 Sacrificial layer 25
2.2.3 Stiffness test 26
Ⅲ. Characteristics of Polyimide Probe 28
3.1 Sacrificial layer 28
3.1.1 Wet etch 28
3.1.1.1 Study of metal sacrificial layer 28
3.1.1.2 Study of silicon sacrificial layer 30
3.1.2 Adhesion layer 32
3.2 Stiffness test 33
Ⅳ. Electrical Characteristics of IGZO TFT 35
4.1 Annealing condition 35
4.2 Substrate of IGZO TFT 37
4.3 Polyimide passivation layer 39
4.4 Source and drain material 41
Ⅴ. Electrical Signal Recording Test 44
5.1 Cell electrical isolation 44
5.2 Electrical signal recording of 1T design 45
5.3 Electrical signal recording of 2T design 46
Ⅵ. Conclusion 49