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Damping Optimization and Advanced Materials Integration towards High-Performance Piezoelectric Resonant Sensors

Title
Damping Optimization and Advanced Materials Integration towards High-Performance Piezoelectric Resonant Sensors
Author(s)
Soon In Jung
DGIST Authors
Soon In JungHoe Joon KimSangyoon Han
Advisor
김회준
Co-Advisor(s)
Sangyoon Han
Issued Date
2022
Awarded Date
2022/08
Type
Thesis
Subject
Piezoelectric MEMS resonators, aluminum nitride contour-mode resonator, surface acoustic wave resonator, quartz crystal microbalance, damping, electrospray, humidity sensor, hygienic and biomedical applications
Description
Piezoelectric MEMS resonators, aluminum nitride contour-mode resonator, surface acoustic wave resonator, quartz crystal microbalance, damping, electrospray, humidity sensor, hygienic and biomedical applications
Abstract
Table Of Contents
Chapter Ⅰ: Introduction 1
1.1 MEMS/NEMS Piezoelectric Resonators 1
1.1.1 Aluminum Nitride Contour-Mode Resonator (AlN-CMRs) 2
1.1.2 Surface Acoustic Wave Resonator (SAWR) 4
1.1.3 Quartz Crystal Microbalance (QCM) 6
1.2 Piezoelectric Resonators for Physical/Chemical Sensing Applications 8
1.3 Dissertation Overview 11
1.4 References 13
Chapter Ⅱ: A Study on the Effects of Bottom Electrode Designs on AlN-CMRs 16
2.1 Introduction 16
2.2 Materials and Methods 20
2.2.1 Resonator Design and Fabrication 20
2.2.2 Experiment and Finite Element Analysis 24
2.3 Results and Discussion 25
2.4 Conclusion 34
2.5 References 36
Chapter Ⅲ: Electrospray Deposition of Graphene Oxide onto QCM for Stable Humidity Detection 39
3.1 Introduction 39
3.2 Materials and Methods 43
3.2.1 Preparation of Graphene Oxide and Electrospray Deposition 43
3.2.2 Humidity Sensing Experiment 44
3.3 Results and Discussion 45
3.4 Conclusion 61
3.5 References 63
Chapter Ⅳ: Single-Chip Multifrequency SAW Humidity Sensor for Hygienic Applications 67
4.1 Introduction 67
4.2 Materials and Methods 71
4.2.1 Fabrication of Multifrequency AlN-SAWR 71
4.2.2 Preparation of GO solution and Electrospray Deposition 72
4.2.3 Humidity Sensing and Human Activity Monitoring Experiments 73
4.3 Results and Discussion 74
4.4 Conclusion 91
4.5 References 92
Chapter V: Noninvasive Diabetes Detection with ZIF-8 Decorated SAW Resonant Sensor 95
5.1 Introduction 95
5.2 Materials and Methods 98
5.2.1 Fabrication Process of Two-Port AlN-SAWR 98
5.2.2 Room Temperature Solvent Assisted ZIF-8 Synthesis and Electrospray Deposition Setup 99
5.2.3 Acetone Sensing Experiment 101
5.3 Results and Discussion 102
5.4 Conclusion 113
5.5 References 115
Chapter VI: Conclusions and Future Work 118
6.1 Future Work 122
6.1.1 A Study on the Effects of Bottom Electrode Designs on AlN-CMRs 122
6.1.2 Electrospray Deposition of Graphene Oxide onto QCM for Humidity 122
6.1.3 Single-Chip Multifrequency SAW Humidity Sensor 124
6.1.4 Metal Organic Frameworks (MOFs) Decorated SAW Resonant Sensor 126
6.2 References 127
요약문 129
URI
http://dgist.dcollection.net/common/orgView/200000628634

http://hdl.handle.net/20.500.11750/16782
DOI
10.22677/thesis.200000628634
Degree
Doctor
Department
Department of Robotics and Mechatronics Engineering
Publisher
DGIST
Related Researcher
  • 김회준 Kim, Hoe Joon
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
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Department of Robotics and Mechatronics Engineering Theses Ph.D.

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