Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김회준 | - |
| dc.contributor.author | Soon In Jung | - |
| dc.date.accessioned | 2022-08-17T16:00:08Z | - |
| dc.date.available | 2022-08-17T16:00:08Z | - |
| dc.date.issued | 2022 | - |
| dc.identifier.uri | http://dgist.dcollection.net/common/orgView/200000628634 | en_US |
| dc.identifier.uri | http://hdl.handle.net/20.500.11750/16782 | - |
| dc.description | Piezoelectric MEMS resonators, aluminum nitride contour-mode resonator, surface acoustic wave resonator, quartz crystal microbalance, damping, electrospray, humidity sensor, hygienic and biomedical applications | - |
| dc.description.abstract | - | |
| dc.description.statementofresponsibility | N | - |
| dc.description.tableofcontents | Chapter Ⅰ: Introduction 1 1.1 MEMS/NEMS Piezoelectric Resonators 1 1.1.1 Aluminum Nitride Contour-Mode Resonator (AlN-CMRs) 2 1.1.2 Surface Acoustic Wave Resonator (SAWR) 4 1.1.3 Quartz Crystal Microbalance (QCM) 6 1.2 Piezoelectric Resonators for Physical/Chemical Sensing Applications 8 1.3 Dissertation Overview 11 1.4 References 13 Chapter Ⅱ: A Study on the Effects of Bottom Electrode Designs on AlN-CMRs 16 2.1 Introduction 16 2.2 Materials and Methods 20 2.2.1 Resonator Design and Fabrication 20 2.2.2 Experiment and Finite Element Analysis 24 2.3 Results and Discussion 25 2.4 Conclusion 34 2.5 References 36 Chapter Ⅲ: Electrospray Deposition of Graphene Oxide onto QCM for Stable Humidity Detection 39 3.1 Introduction 39 3.2 Materials and Methods 43 3.2.1 Preparation of Graphene Oxide and Electrospray Deposition 43 3.2.2 Humidity Sensing Experiment 44 3.3 Results and Discussion 45 3.4 Conclusion 61 3.5 References 63 Chapter Ⅳ: Single-Chip Multifrequency SAW Humidity Sensor for Hygienic Applications 67 4.1 Introduction 67 4.2 Materials and Methods 71 4.2.1 Fabrication of Multifrequency AlN-SAWR 71 4.2.2 Preparation of GO solution and Electrospray Deposition 72 4.2.3 Humidity Sensing and Human Activity Monitoring Experiments 73 4.3 Results and Discussion 74 4.4 Conclusion 91 4.5 References 92 Chapter V: Noninvasive Diabetes Detection with ZIF-8 Decorated SAW Resonant Sensor 95 5.1 Introduction 95 5.2 Materials and Methods 98 5.2.1 Fabrication Process of Two-Port AlN-SAWR 98 5.2.2 Room Temperature Solvent Assisted ZIF-8 Synthesis and Electrospray Deposition Setup 99 5.2.3 Acetone Sensing Experiment 101 5.3 Results and Discussion 102 5.4 Conclusion 113 5.5 References 115 Chapter VI: Conclusions and Future Work 118 6.1 Future Work 122 6.1.1 A Study on the Effects of Bottom Electrode Designs on AlN-CMRs 122 6.1.2 Electrospray Deposition of Graphene Oxide onto QCM for Humidity 122 6.1.3 Single-Chip Multifrequency SAW Humidity Sensor 124 6.1.4 Metal Organic Frameworks (MOFs) Decorated SAW Resonant Sensor 126 6.2 References 127 요약문 129 |
- |
| dc.format.extent | 145 | - |
| dc.language | eng | - |
| dc.publisher | DGIST | - |
| dc.subject | Piezoelectric MEMS resonators, aluminum nitride contour-mode resonator, surface acoustic wave resonator, quartz crystal microbalance, damping, electrospray, humidity sensor, hygienic and biomedical applications | - |
| dc.title | Damping Optimization and Advanced Materials Integration towards High-Performance Piezoelectric Resonant Sensors | - |
| dc.type | Thesis | - |
| dc.identifier.doi | 10.22677/thesis.200000628634 | - |
| dc.description.degree | Doctor | - |
| dc.contributor.department | Department of Robotics and Mechatronics Engineering | - |
| dc.contributor.coadvisor | Sangyoon Han | - |
| dc.date.awarded | 2022/08 | - |
| dc.publisher.location | Daegu | - |
| dc.description.database | dCollection | - |
| dc.citation | XT.RD 정56 202208 | - |
| dc.date.accepted | 8/11/22 | - |
| dc.contributor.alternativeDepartment | 로봇및기계전자공학과 | - |
| dc.embargo.liftdate | 2024-08-31 | - |
| dc.contributor.affiliatedAuthor | Soon In Jung | - |
| dc.contributor.affiliatedAuthor | Hoe Joon Kim | - |
| dc.contributor.affiliatedAuthor | Sangyoon Han | - |
| dc.contributor.alternativeName | 정순인 | - |
| dc.contributor.alternativeName | Hoe Joon Kim | - |
| dc.contributor.alternativeName | 한상윤 | - |
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