Title

Damping Optimization and Advanced Materials Integration towards High-Performance Piezoelectric Resonant Sensors

DGIST Authors

Soon In Jung ; Hoe Joon Kim ; Sangyoon Han

Advisor

김회준

Co-Advisor(s)

Sangyoon Han

Issued Date

2022

Awarded Date

2022/08

Citation

Soon In Jung. (2022). Damping Optimization and Advanced Materials Integration towards High-Performance Piezoelectric Resonant Sensors. doi: 10.22677/thesis.200000628634

Type

Thesis

Subject

Piezoelectric MEMS resonators, aluminum nitride contour-mode resonator, surface acoustic wave resonator, quartz crystal microbalance, damping, electrospray, humidity sensor, hygienic and biomedical applications

Description

Piezoelectric MEMS resonators, aluminum nitride contour-mode resonator, surface acoustic wave resonator, quartz crystal microbalance, damping, electrospray, humidity sensor, hygienic and biomedical applications

Abstract

Table Of Contents

Chapter Ⅰ: Introduction 1
1.1 MEMS/NEMS Piezoelectric Resonators 1
1.1.1 Aluminum Nitride Contour-Mode Resonator (AlN-CMRs) 2
1.1.2 Surface Acoustic Wave Resonator (SAWR) 4
1.1.3 Quartz Crystal Microbalance (QCM) 6
1.2 Piezoelectric Resonators for Physical/Chemical Sensing Applications 8
1.3 Dissertation Overview 11
1.4 References 13
Chapter Ⅱ: A Study on the Effects of Bottom Electrode Designs on AlN-CMRs 16
2.1 Introduction 16
2.2 Materials and Methods 20
2.2.1 Resonator Design and Fabrication 20
2.2.2 Experiment and Finite Element Analysis 24
2.3 Results and Discussion 25
2.4 Conclusion 34
2.5 References 36
Chapter Ⅲ: Electrospray Deposition of Graphene Oxide onto QCM for Stable Humidity Detection 39
3.1 Introduction 39
3.2 Materials and Methods 43
3.2.1 Preparation of Graphene Oxide and Electrospray Deposition 43
3.2.2 Humidity Sensing Experiment 44
3.3 Results and Discussion 45
3.4 Conclusion 61
3.5 References 63
Chapter Ⅳ: Single-Chip Multifrequency SAW Humidity Sensor for Hygienic Applications 67
4.1 Introduction 67
4.2 Materials and Methods 71
4.2.1 Fabrication of Multifrequency AlN-SAWR 71
4.2.2 Preparation of GO solution and Electrospray Deposition 72
4.2.3 Humidity Sensing and Human Activity Monitoring Experiments 73
4.3 Results and Discussion 74
4.4 Conclusion 91
4.5 References 92
Chapter V: Noninvasive Diabetes Detection with ZIF-8 Decorated SAW Resonant Sensor 95
5.1 Introduction 95
5.2 Materials and Methods 98
5.2.1 Fabrication Process of Two-Port AlN-SAWR 98
5.2.2 Room Temperature Solvent Assisted ZIF-8 Synthesis and Electrospray Deposition Setup 99
5.2.3 Acetone Sensing Experiment 101
5.3 Results and Discussion 102
5.4 Conclusion 113
5.5 References 115
Chapter VI: Conclusions and Future Work 118
6.1 Future Work 122
6.1.1 A Study on the Effects of Bottom Electrode Designs on AlN-CMRs 122
6.1.2 Electrospray Deposition of Graphene Oxide onto QCM for Humidity 122
6.1.3 Single-Chip Multifrequency SAW Humidity Sensor 124
6.1.4 Metal Organic Frameworks (MOFs) Decorated SAW Resonant Sensor 126
6.2 References 127
요약문 129

URI

http://dgist.dcollection.net/common/orgView/200000628634
http://hdl.handle.net/20.500.11750/16782

DOI

10.22677/thesis.200000628634

Degree

Doctor

Department

Department of Robotics and Mechatronics Engineering

Publisher

DGIST

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