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|Issue Date||Title Author(s) Journal||Views|
A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design
31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, 767-770
Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection
30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, 109-112
The Impact of Bottom Electrode Coverage Rate on Electromechanical Coupling and Quality Factor of AlN MEMS Contour Mode Resonators
20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 917-920