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dc.contributor.author Kim, Jae Hyun -
dc.contributor.author Seo, Hong-Seok -
dc.contributor.author Kim, K. Phil -
dc.contributor.author Lyu, Hong-Keun -
dc.contributor.author Woo, Sung-Ho -
dc.contributor.author Lee, Jung Ho -
dc.date.available 2017-07-11T08:27:16Z -
dc.date.created 2017-05-08 -
dc.date.issued 2008 -
dc.identifier.isbn 9780000000000 -
dc.identifier.issn 1938-5862 -
dc.identifier.uri http://hdl.handle.net/20.500.11750/3992 -
dc.description.abstract Random and ordered macropore formation in p-type silicon substrate (10-20 Ω·cm) by electrochemical anodization in various HF-containing electrolytes was investigated under different operating conditions. The effect of electrolyte composition controlling the macropore formation both for random and periodically arranged pores is reported. The role played by etch pit for ordered macropore formation was investigated. The results revealed that the nature of constituents of solution plays very important roles in determining pore formation and morphology and the stable ordered macropore growth is not possible without etch pit. By using Si/SiGe/Si/SiGe/p-type silicon structure, ordered pillar structures were fabricated without etch pit formation process. The possible role of two sets of Si/SiGe layer for pillar formation is proposed. © The Electrochemical Society. -
dc.publisher Electrochemical Society -
dc.relation.ispartof Porous Semiconductors: A Symposium Held in Memory of Vitali Parkhutik and Volker Lehmann - 214th ECS Meeting -
dc.title Macropore formation in p-type silicon and Si/SiGe/Si/SiGe/p-type silicon -
dc.type Conference Paper -
dc.identifier.doi 10.1149/1.2982566 -
dc.identifier.scopusid 2-s2.0-63849290304 -
dc.identifier.bibliographicCitation Porous Semiconductors: A Symposium Held in Memory of Vitali Parkhutik and Volker Lehmann - 214th ECS Meeting, v.16, no.3, pp.277 - 283 -
dc.citation.conferenceDate 2008-10-12 -
dc.citation.conferencePlace US -
dc.citation.conferencePlace Honolulu, HI -
dc.citation.endPage 283 -
dc.citation.number 3 -
dc.citation.startPage 277 -
dc.citation.title Porous Semiconductors: A Symposium Held in Memory of Vitali Parkhutik and Volker Lehmann - 214th ECS Meeting -
dc.citation.volume 16 -
dc.type.docType Conference Paper -
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Division of Electronics & Information System 2. Conference Papers
Division of Energy Technology 2. Conference Papers

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