Title

Programmable Photonic Integrated Circuits Using Low Power Consumption MEMS

DGIST Authors

Man J. Her ; Sangyoon Han ; Jaesok Yu

Advisor

한상윤

Co-Advisor(s)

Jaesok Yu

Issued Date

2023

Awarded Date

2023-02-01

Citation

Man J. Her. (2023). Programmable Photonic Integrated Circuits Using Low Power Consumption MEMS. doi: 10.22677/THESIS.200000656269

Type

Thesis

Description

silicon photonics, photonic integrated circuits, FPPGA, programmable, MEMS

Table Of Contents

Ⅰ. Introduction 1
1.1 Motivation 1
Ⅱ. Device Architecture 4
2.1 MEMS Devices 4
2.1.1 Vertical Comb-Type MEMS Tunable Directional Coupler 4
2.1.2 Vertical Comb-Type MEMS Tunable Phase Shifter 10
2.1.3 In-plane Comb-Type MEMS Tunable Phase Shifter 15
2.2 Device Concept 19
2.2.1 Sagnac Loop Reflector 19
2.2.2 Field Programmable Photonic Gate Array 21
Ⅲ. Results 24
3.1 Fabrication 24
3.1.1 Fabrication Process 24
3.1.2 Fabrication Results 26
3.2 MEMS Devices 28
3.2.1 Vertical Comb-Type MEMS Tunable Directional Coupler 28
3.2.2 In-plane Comb-Type MEMS Tunable Phase Shifter 30
3.3 Device Configurations 31
3.3.1 Sagnac Loop Reflector 31
3.3.2 Field Programmable Photonic Gate Array 34
Ⅳ. Conclusion 39
References 40

URI

http://hdl.handle.net/20.500.11750/45718
http://dgist.dcollection.net/common/orgView/200000656269

DOI

10.22677/THESIS.200000656269

Degree

Master

Department

Department of Robotics and Mechatronics Engineering

Publisher

DGIST

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