Title

Thermal Operation and Direct Materials Integration of Piezoelectric Resonant Sensors for Fine Particle Detection and Humidity Sensing

Alternative Title

환경 모니터링을 위한 압전 공진 센서의 열적 구동 및 물질 결합

DGIST Authors

Il Ryu Jang ; Hoe Joon Kim ; Hongki Kang

Advisor

김회준

Co-Advisor(s)

Hongki Kang

Issued Date

2024

Awarded Date

2024-02-01

Citation

Il Ryu Jang. (2024). Thermal Operation and Direct Materials Integration of Piezoelectric Resonant Sensors for Fine Particle Detection and Humidity Sensing. doi: 10.22677/THESIS.200000724171

Type

Thesis

Description

Piezoelectric resonator; QCM; SAW; Interfacial adhesion; Damping effect; Reliability; Stability; Microheater

Table Of Contents

ABSTRACT v
TABLE OF CONTENTS viii
CHAPTER 1: Introduction 1
1.1 Piezoelectric Resonant Sensor 1
1.1.1 Quartz Crystal Microbalance (QCM) 1
1.1.2 Surface Acoustic Wave (SAW) 2
1.2 Theoretical Equation and Required Conditions for Mass Calibration of a Resonator 3
1.3 Main Issues in Resonator-based Sensing 5
1.4 List of Publications for Each Chapter 7
1.5 References 9
CHAPTER 2: Self-limited Nucleation for In-Liquid Particle Detection 12
2.1 Introduction 12
2.2 Fabrication of CNT-QCMs 13
2.3 Particle Deposition and Formation Mechanisms 14
2.4 Results and Discussion 17
2.5 Conclusion 22
2.6 References 23
CHAPTER 3: Thermally-controlled Surface Adhesion for an Efficient Fine Dust Collection and Sensing 29
3.1 Introduction 29
3.2 Materials and Methods 32
3.3 Results and Discussion 33
3.4 Conclusion 46
3.5 References 47
CHAPTER 4: Direct and Controlled Device Integration of Graphene Oxide for Stable Humidity Sensing 53
4.1 Introduction 53
4.2 Preparation of GO Solution and Electrospray Deposition 55
4.3 Humidity Sensing Experiment 56
4.4 Results and Discussion 57
4.5 Conclusion 69
4.6 References 70
CHAPTER 5: Multi-frequency Surface Acoustic Wave Humidity Sensor for Hygienic Applications 75
5.1 Introduction 75
5.2 Materials and Methods 78
5.3 Results and Discussion 81
5.4 Conclusion 96
5.5 References 97
CHAPTER 6: Heated QCM for Ultra-reliable Humidity Sensing 103
6.1 Introduction 103
6.2 Synthesis and Characterization of ZIF-67 105
6.3 Device Fabrication and Experiment 106
6.4 Results and Discussion 108
6.5 Conclusion 120
6.6 References 121
CHAPTER 7: Interfacial Adhesion Control via Reduction of Graphene Oxide for Heterogeneous Material Integration 127
7.1 Introduction 127
7.2 Results and Discussion 129
7.3 Methods 144
7.4 Conclusion 148
7.5 References 148
CHAPTER 8: Enhanced Lifetime of QCM Particle Sensor in PECVD through Bypass Piping 153
8.1 Introduction 153
8.2 Particle Sensing Setup & Process Condition 155
8.3 Device Fabrication & Characterization 156
8.4 ex-situ Analysis 157
8.5 Results and Discussion 158
8.6 Conclusion 170
8.7 References 172
CHAPTER 9: Conclusions and Future Work 178
9.1 Conclusions 178
9.2 Future Work 181
9.2.1 High Precision Mass Sensing with Multi-frequency SAW 181
9.2.2 Particle Sizing and Sensing System with multi-frequency SAW 182
9.2.3 Cortisol Sensing with a Flexible Thin Film Transistor 183
9.3 References 185
요 약 문 188
APPENDIX A: Heated QCM Fabrication Process 190
APPENDIX B: Multi-frequency SAW Fabrication Process 193
APPENDIX C: Wearable Phototherapy Device Fabrication Process 195

URI

http://hdl.handle.net/20.500.11750/48014
http://dgist.dcollection.net/common/orgView/200000724171

DOI

10.22677/THESIS.200000724171

Degree

Doctor

Department

Department of Robotics and Mechatronics Engineering

Publisher

DGIST

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