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dc.contributor.advisor 한상윤 -
dc.contributor.author Myeongseok Hong -
dc.date.accessioned 2024-02-29T21:01:50Z -
dc.date.available 2024-02-29T21:01:50Z -
dc.date.issued 2024 -
dc.identifier.uri http://hdl.handle.net/20.500.11750/48078 -
dc.identifier.uri http://dgist.dcollection.net/common/orgView/200000725378 -
dc.description 실리콘 포토닉스;Silicon photonics -
dc.description.tableofcontents Ⅰ. Introduction 1
1.1 Motivation 1
1.1.1 Integrated Mach-Zehnder Interferometer (MZI) 1
1.1.2 Tunable delay line · 2
1.1.3 Advantages of programmable MZI with MEMS-based tunable delay line 4

Ⅱ. Device Architecture 7
2.1 Overall architecture of the device · 7
2.2 Unit delay cell and MEMS-tunable directional coupler 8

Ⅲ. Method 12
3.1 Device design · 12
3.1.1 Optical design of MEMS-tunable coupler 12
3.1.2 Mechanical design of MEMS-tunable coupler 15
3.2 Device fabrication · 16

Ⅳ. Experiment 18
4.1 Experimental setup 18
4.2 Response of programmable MZI 18
4.2.1 Free spectral range tuning 18
4.2.2 Extinction ratio tuning 20
4.3 Mechanical response of MEMS-tunable coupler 21
4.3.1 Time response · 21
4.3.2 Electrical power consumption · 22

Ⅴ. Future work 24

Ⅵ. Conclusion 25

Ⅶ. Appendix: Fabrication process 26

References 28
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dc.format.extent 30 -
dc.language eng -
dc.publisher DGIST -
dc.title On-chip programmable Mach-Zehnder Interferometer based on silicon photonic MEMS -
dc.title.alternative 실리콘 포토닉 멤스 기반 온-칩 프로그래머블 마하-젠더 간섭계 -
dc.type Thesis -
dc.identifier.doi 10.22677/THESIS.200000725378 -
dc.description.degree Master -
dc.contributor.department Department of Robotics and Mechatronics Engineering -
dc.contributor.coadvisor Jaesok Yu -
dc.date.awarded 2024-02-01 -
dc.publisher.location Daegu -
dc.description.database dCollection -
dc.citation XT.RM홍34 202402 -
dc.date.accepted 2024-01-30 -
dc.contributor.alternativeDepartment 로봇및기계전자공학과 -
dc.subject.keyword 실리콘 포토닉스 -
dc.subject.keyword Silicon photonics -
dc.contributor.affiliatedAuthor Myeongseok Hong -
dc.contributor.affiliatedAuthor Sangyoon Han -
dc.contributor.affiliatedAuthor Jaesok Yu -
dc.contributor.alternativeName 홍명석 -
dc.contributor.alternativeName Sangyoon Han -
dc.contributor.alternativeName 유재석 -
dc.rights.embargoReleaseDate 2025-02-28 -
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