Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 한상윤 | - |
dc.contributor.author | Myeongseok Hong | - |
dc.date.accessioned | 2024-02-29T21:01:50Z | - |
dc.date.available | 2024-02-29T21:01:50Z | - |
dc.date.issued | 2024 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/48078 | - |
dc.identifier.uri | http://dgist.dcollection.net/common/orgView/200000725378 | - |
dc.description | 실리콘 포토닉스;Silicon photonics | - |
dc.description.tableofcontents | Ⅰ. Introduction 1 1.1 Motivation 1 1.1.1 Integrated Mach-Zehnder Interferometer (MZI) 1 1.1.2 Tunable delay line · 2 1.1.3 Advantages of programmable MZI with MEMS-based tunable delay line 4 Ⅱ. Device Architecture 7 2.1 Overall architecture of the device · 7 2.2 Unit delay cell and MEMS-tunable directional coupler 8 Ⅲ. Method 12 3.1 Device design · 12 3.1.1 Optical design of MEMS-tunable coupler 12 3.1.2 Mechanical design of MEMS-tunable coupler 15 3.2 Device fabrication · 16 Ⅳ. Experiment 18 4.1 Experimental setup 18 4.2 Response of programmable MZI 18 4.2.1 Free spectral range tuning 18 4.2.2 Extinction ratio tuning 20 4.3 Mechanical response of MEMS-tunable coupler 21 4.3.1 Time response · 21 4.3.2 Electrical power consumption · 22 Ⅴ. Future work 24 Ⅵ. Conclusion 25 Ⅶ. Appendix: Fabrication process 26 References 28 |
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dc.format.extent | 30 | - |
dc.language | eng | - |
dc.publisher | DGIST | - |
dc.title | On-chip programmable Mach-Zehnder Interferometer based on silicon photonic MEMS | - |
dc.title.alternative | 실리콘 포토닉 멤스 기반 온-칩 프로그래머블 마하-젠더 간섭계 | - |
dc.type | Thesis | - |
dc.identifier.doi | 10.22677/THESIS.200000725378 | - |
dc.description.degree | Master | - |
dc.contributor.department | Department of Robotics and Mechatronics Engineering | - |
dc.contributor.coadvisor | Jaesok Yu | - |
dc.date.awarded | 2024-02-01 | - |
dc.publisher.location | Daegu | - |
dc.description.database | dCollection | - |
dc.citation | XT.RM홍34 202402 | - |
dc.date.accepted | 2024-01-30 | - |
dc.contributor.alternativeDepartment | 로봇및기계전자공학과 | - |
dc.subject.keyword | 실리콘 포토닉스 | - |
dc.subject.keyword | Silicon photonics | - |
dc.contributor.affiliatedAuthor | Myeongseok Hong | - |
dc.contributor.affiliatedAuthor | Sangyoon Han | - |
dc.contributor.affiliatedAuthor | Jaesok Yu | - |
dc.contributor.alternativeName | 홍명석 | - |
dc.contributor.alternativeName | Sangyoon Han | - |
dc.contributor.alternativeName | 유재석 | - |
dc.rights.embargoReleaseDate | 2025-02-28 | - |
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