Title

On-chip programmable Mach-Zehnder Interferometer based on silicon photonic MEMS

Alternative Title

실리콘 포토닉 멤스 기반 온-칩 프로그래머블 마하-젠더 간섭계

DGIST Authors

Myeongseok Hong ; Sangyoon Han ; Jaesok Yu

Advisor

한상윤

Co-Advisor(s)

Jaesok Yu

Issued Date

2024

Awarded Date

2024-02-01

Citation

Myeongseok Hong. (2024). On-chip programmable Mach-Zehnder Interferometer based on silicon photonic MEMS. doi: 10.22677/THESIS.200000725378

Type

Thesis

Description

실리콘 포토닉스;Silicon photonics

Table Of Contents

Ⅰ. Introduction 1
1.1 Motivation 1
1.1.1 Integrated Mach-Zehnder Interferometer (MZI) 1
1.1.2 Tunable delay line · 2
1.1.3 Advantages of programmable MZI with MEMS-based tunable delay line 4

Ⅱ. Device Architecture 7
2.1 Overall architecture of the device · 7
2.2 Unit delay cell and MEMS-tunable directional coupler 8

Ⅲ. Method 12
3.1 Device design · 12
3.1.1 Optical design of MEMS-tunable coupler 12
3.1.2 Mechanical design of MEMS-tunable coupler 15
3.2 Device fabrication · 16

Ⅳ. Experiment 18
4.1 Experimental setup 18
4.2 Response of programmable MZI 18
4.2.1 Free spectral range tuning 18
4.2.2 Extinction ratio tuning 20
4.3 Mechanical response of MEMS-tunable coupler 21
4.3.1 Time response · 21
4.3.2 Electrical power consumption · 22

Ⅴ. Future work 24

Ⅵ. Conclusion 25

Ⅶ. Appendix: Fabrication process 26

References 28

URI

http://hdl.handle.net/20.500.11750/48078
http://dgist.dcollection.net/common/orgView/200000725378

DOI

10.22677/THESIS.200000725378

Degree

Master

Department

Department of Robotics and Mechatronics Engineering

Publisher

DGIST

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