MULTI-AXIS MAGNETO-RESISTANCE SENSOR ANNEALING SYSTEM, MULTI-AXIS MAGNETO-RESISTANCE SENSOR, AND METHOD FOR MANUFACTURING MULTI-AXIS MAGNETO-RESISTANCE SENSOR

Abstract

Disclosed are a multi-axis magneto-resistance sensor annealing system, a multi-axis magneto-resistance sensor, and a method for manufacturing a multi-axis magneto-resistance sensor. A multi-axis magneto-resistance sensor annealing system according to one embodiment of the present invention comprises: multi-axis magneto-resistance sensors; magnetic flux guides positioned on the central parts of the plurality of multi-axis magneto-resistance sensors; magnetic field generation units that are positioned on the upper and lower parts of the multi-axis magneto-resistance sensors and the magnetic flux guides and generate a magnetic field; and a heating unit which accommodates the multi-axis magneto-resistance sensors, the magnetic flux guides, and the magnetic field generation units therein and performs an annealing process by heating same.