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MULTI-AXIS MAGNETO-RESISTANCE SENSOR ANNEALING SYSTEM, MULTI-AXIS MAGNETO-RESISTANCE SENSOR, AND METHOD FOR MANUFACTURING MULTI-AXIS MAGNETO-RESISTANCE SENSOR
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Title
MULTI-AXIS MAGNETO-RESISTANCE SENSOR ANNEALING SYSTEM, MULTI-AXIS MAGNETO-RESISTANCE SENSOR, AND METHOD FOR MANUFACTURING MULTI-AXIS MAGNETO-RESISTANCE SENSOR
Alternative Title
MULTIAXIAL MAGNETORESISTANCE SENSOR ANNEALING SYSTEM, MULTIAXIAL MAGNETORESISTANCE SENSOR, AND MANUFACTURING METHOD OF MULTIAXIAL MAGNETORESISTANCE SENSOR
Country
UN
Application Date
2025-02-13
Application No.
PCT/KR2025/002159
Registration Date
2025-10-09
Publication No.
2025211575
Assignee
DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY,재단법인대구경북과학기술원
URI
https://scholar.dgist.ac.kr/handle/20.500.11750/59198 PCT/KR2025/002159
Abstract
Disclosed are a multi-axis magneto-resistance sensor annealing system, a multi-axis magneto-resistance sensor, and a method for manufacturing a multi-axis magneto-resistance sensor. A multi-axis magneto-resistance sensor annealing system according to one embodiment of the present invention comprises: multi-axis magneto-resistance sensors; magnetic flux guides positioned on the central parts of the plurality of multi-axis magneto-resistance sensors; magnetic field generation units that are positioned on the upper and lower parts of the multi-axis magneto-resistance sensors and the magnetic flux guides and generate a magnetic field; and a heating unit which accommodates the multi-axis magneto-resistance sensors, the magnetic flux guides, and the magnetic field generation units therein and performs an annealing process by heating same.
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Kim, CheolGi김철기

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