MOTORIZED SHUTTER MODULE OF SPUTTERING ION SOURCE

Abstract

A motorized shutter module of a sputtering ion source may be provided according to one aspect of the present invention, the motorized shutter module comprising: a first shutter installed to open and close a target at a front side of a sputtering ion source; a first opening and closing device unit to which one end of the first shutter is connected and which operates the first shutter to open and close in a direction orthogonal to the target; and a first motor providing power to the first opening and closing device unit.