The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs)
Title
The simulation and fabrication of the miniaturized sensor for biometrics using Aluminium nitride (AlN) based piezoelectric micromachined ultrasonic transducers (pMUTs)
Alternative Title
질화 알루미늄 (AlN) 기반의 압전 미세 가공 초음파 트랜스 듀서(pMUT)를 이용한 생체인식 용 소형 센서의 시뮬레이션 및 제작