Cited 4 time in webofscience Cited 3 time in scopus

A High-Speed Inkjet-Printed Microelectromechanical Relay With a Mechanically Enhanced Double-Clamped Channel-Beam

Title
A High-Speed Inkjet-Printed Microelectromechanical Relay With a Mechanically Enhanced Double-Clamped Channel-Beam
Authors
Chung, SeungjunAhosan, MuhammedKarim, UlKwon, Hyuk-JunScheideler, WilliamSubramanian, Vivek
DGIST Authors
Kwon, Hyuk-Jun
Issue Date
2017-02
Citation
Journal of Microelectromechanical Systems, 26(1), 95-101
Type
Article
Article Type
Article
Keywords
TRANSISTORSSTICTION
ISSN
1057-7157
Abstract
We report a high-speed inkjet-printed three-terminal microelectromechanical (MEM) relay with a double-clamped beam that exploits the enhanced stiffness of the double-clamped structure to improve electrical performance. To minimize mechanical delay and pull-in voltage, the contact gap between the channel-beam and drain, and the stiffness of the beam and shape of the drain was carefully designed and optimized through a 3-D finite element simulation. The double-clamped beam prevents stiction-related failure between the channel-beam and drain despite the contact gap being only 370 nm for a > 500μm long beam. The resulting printed relay delivers a turn-ON delay of 8μs at a gate voltage of 10 V, a pull-in voltage of only 7.2 V, immeasurable off-leakage, excellent subthreshold swing, and a small hysteresis window of 2 V without any bending or collapsing of the beam. The device also shows reliable operation over 105 cycles while maintaining a high ON/OFF ratio of 108, and extremely low ON-state resistance of 3.7 Ω. [2016-0180] © 1992-2012 IEEE.
URI
http://hdl.handle.net/20.500.11750/6450
DOI
10.1109/JMEMS.2016.2613877
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Related Researcher
  • Author Kwon, Hyuk-Jun Advanced Electronic Devices Research Group(AEDRG)
  • Research Interests
Files:
There are no files associated with this item.
Collection:
Department of Information and Communication EngineeringAdvanced Electronic Devices Research Group(AEDRG)1. Journal Articles


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