Cited 0 time in webofscience Cited 0 time in scopus

A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design

Title
A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design
Authors
Kim, Hoe JoonJung, Soon InSegovia-Fernandez, JeronimoPiazza, Gianluca
DGIST Authors
Kim, Hoe Joon
Issue Date
2018-01-21
Citation
31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, 767-770
Type
Conference
ISBN
9781538647820
ISSN
1084-6999
Abstract
This paper presents experimental studies of flicker frequency (1/f) noise of 1 GHz aluminum nitride (AlN) contour mode resonators (CMR) as a function of electrode design. AlN CMRs with various electrode dimensions and different top electrode materials of Al, Au, and Pt are fabricated to give a wide range of thermoelastic damping (TED), which directly impacts the flicker noise of CMRs. We have measured the flicker noise of a total of 64 devices and the results show that flicker noise decreases with increasing Q, with a power law dependence which ranges from 1/Q3.2 to 1/Q3.8. Interestingly, the noise level also depends on the type of electrode materials, where the devices with Pt top electrode demonstrate the best noise performance. Our results indicate that a careful selection of the electrode material and dimensions could further reduce 1/f noise not only in AlN CMRs, but also in various classes of resonators, and thus enable ultra-low noise MEMS resonators for sensing and RF applications. © 2018 IEEE.
URI
http://hdl.handle.net/20.500.11750/6566
DOI
10.1109/MEMSYS.2018.8346668
Publisher
Institute of Electrical and Electronics Engineers Inc.
Related Researcher
  • Author Kim, Hoe Joon Nano Materials and Devices Lab
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
Files:
There are no files associated with this item.
Collection:
Department of Robotics EngineeringNano Materials and Devices Lab2. Conference Papers


qrcode mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE