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A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design
- A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design
- Kim, Hoe Joon; Jung, Soon In; Segovia-Fernandez, Jeronimo; Piazza, Gianluca
- DGIST Authors
- Kim, Hoe Joon
- Issue Date
- 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, 767-770
- This paper presents experimental studies of flicker frequency (1/f) noise of 1 GHz aluminum nitride (AlN) contour mode resonators (CMR) as a function of electrode design. AlN CMRs with various electrode dimensions and different top electrode materials of Al, Au, and Pt are fabricated to give a wide range of thermoelastic damping (TED), which directly impacts the flicker noise of CMRs. We have measured the flicker noise of a total of 64 devices and the results show that flicker noise decreases with increasing Q, with a power law dependence which ranges from 1/Q3.2 to 1/Q3.8. Interestingly, the noise level also depends on the type of electrode materials, where the devices with Pt top electrode demonstrate the best noise performance. Our results indicate that a careful selection of the electrode material and dimensions could further reduce 1/f noise not only in AlN CMRs, but also in various classes of resonators, and thus enable ultra-low noise MEMS resonators for sensing and RF applications. © 2018 IEEE.
- Institute of Electrical and Electronics Engineers Inc.
- Related Researcher
Kim, Hoe Joon
Nano Materials and Devices Lab
MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
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- Department of Robotics EngineeringNano Materials and Devices Lab2. Conference Papers
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