Cited 26 time in
Cited 27 time in
Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf-Sputtering for Wrist-Worn Piezoelectric Energy Harvesters
- Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf-Sputtering for Wrist-Worn Piezoelectric Energy Harvesters
- Yeo, Hong Goo; Xue, Tiancheng; Roundy, Shad; Ma, Xiaokun; Rahn, Christopher; Trolier-Mckinstry, Susan
- Issue Date
- Advanced Functional Materials, 28(36)
- Article Type
- Author Keywords
- flexible metal foils; PZT thin films; rf-sputtering; textures; wearable piezoelectric energy harvesters
- TITANATE THIN-FILMS; LEAD LOSS; DEPOSITION; MEMS; MICROSTRUCTURE; TEMPERATURE
- For piezoelectric energy harvesters, a large volume of piezoelectric material with a high figure of merit is essential to obtain a higher power density. The work describes the growth of highly (001) oriented sputtered lead zirconate titanate (PZT) films (f ≈ 0.99) exceeding 4 μm in thickness on both sides of an Ni foil to produce a bimorph structure. These films are incorporated in novel wrist-worn energy harvesters (<16 cm2) in which piezoelectric beams are plucked magnetically using an eccentric rotor with embedded magnets to implement frequency up-conversion. The resulting devices successfully convert low-frequency vibration sources (i.e., from walking, rotating the wrist, and jogging) to higher frequency vibrations of the PZT beams (100-200 Hz). Measured at resonance, six beams producing an output of 1.2 mW is achieved at 0.15 G acceleration. For magnetic plucking of a wrist-worn nonresonant device, 40-50 μW is produced during mild activity. © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
- Wiley-VCH Verlag
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.