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Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf-Sputtering for Wrist-Worn Piezoelectric Energy Harvesters

Title
Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf-Sputtering for Wrist-Worn Piezoelectric Energy Harvesters
Authors
Yeo, Hong GooXue, TianchengRoundy, ShadMa, XiaokunRahn, ChristopherTrolier-Mckinstry, Susan
Issue Date
2018-09
Citation
Advanced Functional Materials, 28(36)
Type
Article
Article Type
Article
Author Keywords
flexible metal foilsPZT thin filmsrf-sputteringtextureswearable piezoelectric energy harvesters
Keywords
TITANATE THIN-FILMSLEAD LOSSDEPOSITIONMEMSMICROSTRUCTURETEMPERATURE
ISSN
1616-301X
Abstract
For piezoelectric energy harvesters, a large volume of piezoelectric material with a high figure of merit is essential to obtain a higher power density. The work describes the growth of highly (001) oriented sputtered lead zirconate titanate (PZT) films (f ≈ 0.99) exceeding 4 μm in thickness on both sides of an Ni foil to produce a bimorph structure. These films are incorporated in novel wrist-worn energy harvesters (<16 cm2) in which piezoelectric beams are plucked magnetically using an eccentric rotor with embedded magnets to implement frequency up-conversion. The resulting devices successfully convert low-frequency vibration sources (i.e., from walking, rotating the wrist, and jogging) to higher frequency vibrations of the PZT beams (100-200 Hz). Measured at resonance, six beams producing an output of 1.2 mW is achieved at 0.15 G acceleration. For magnetic plucking of a wrist-worn nonresonant device, 40-50 μW is produced during mild activity. © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
URI
http://hdl.handle.net/20.500.11750/9101
DOI
10.1002/adfm.201801327
Publisher
Wiley-VCH Verlag
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