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Issue Date Title Author(s) Journal View
2017-06-27
Atomic Layer Deposition of ZrO2 thin films Using CpZrNMe23 and Water

Lee, Sang Ju ;  Lee, Eui Jin ;  Sung, Shi Joon ;  Kang, Jin-Kyu ;  강고루 ;  윤주영 ;  Kim, Dae-Hwan

2017 International Forum on Functional Materials IFFM2017, pp.210, 2017-06-27

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