Showing results 1 to 3 of 3
- 2019-11
- Jung, Soon In. (2019-11). A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators. Micromachines, 10(11). doi: 10.3390/mi10110758
- Multidisciplinary Digital Publishing Institute (MDPI)
- View : 683
- Download : 131
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Shin, Eun Jung
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Yeo, Hong Goo
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Yeon, Ara
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Jin, Changzhu
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Park, Wonki
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Lee, Sung-Chul
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Choi, Hongsoo
- 2020-06
- Shin, Eun Jung. (2020-06). Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film. Micromachines, 11(6), 1–17. doi: 10.3390/mi11060623
- Multidisciplinary Digital Publishing Institute (MDPI)
- View : 633
- Download : 107
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Yeo, Hong Goo
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Jung, Joontaek
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Sim, Minkyung
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Jang, Jae Eun
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Choi, Hongsoo
- 2020-01
- Yeo, Hong Goo. (2020-01). Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array. doi: 10.3390/s20010315
- MDPI AG
- View : 757
- Download : 125
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