Browsing by Titles

Showing results 1 to 3 of 3

A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators

  • 2019-11
  • Jung, Soon In. (2019-11). A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators. Micromachines, 10(11). doi: 10.3390/mi10110758
  • Multidisciplinary Digital Publishing Institute (MDPI)
  • View : 683
  • Download : 131

Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film

  • Shin, Eun Jung
  • Yeo, Hong Goo
  • Yeon, Ara
  • Jin, Changzhu
  • Park, Wonki
  • Lee, Sung-Chul
  • Choi, Hongsoo
  • 2020-06
  • Shin, Eun Jung. (2020-06). Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film. Micromachines, 11(6), 1–17. doi: 10.3390/mi11060623
  • Multidisciplinary Digital Publishing Institute (MDPI)
  • View : 633
  • Download : 107

Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array

  • Yeo, Hong Goo
  • Jung, Joontaek
  • Sim, Minkyung
  • Jang, Jae Eun
  • Choi, Hongsoo
  • 2020-01
  • Yeo, Hong Goo. (2020-01). Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array. doi: 10.3390/s20010315
  • MDPI AG
  • View : 757
  • Download : 125
1