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Issue Date Title Author(s) Journal View
2019-11

A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators

Jung, Soon In Ryu C. Piazza G. Kim, Hoe Joon

Micromachines, v.10, no.11, 2019-11

519
2020-06

Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film

Shin, Eun Jung Yeo, Hong Goo Yeon, Ara Jin, Changzhu Park, Wonki Lee, Sung-Chul Choi, Hongsoo

Micromachines, v.11, no.6, pp.1 - 17, 2020-06

408
2020-01 528
1

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