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A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators

Article
A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators
  • 2019-11
  • Jung, Soon In. (2019-11). A study on the effects of bottom electrode designs on aluminum nitride contour-mode resonators. Micromachines, 10(11). doi: 10.3390/mi10110758
  • Multidisciplinary Digital Publishing Institute (MDPI)
  • View : 715
  • Download : 155

Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film

Article
Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film
  • Shin, Eun Jung ; 
  • Yeo, Hong Goo ; 
  • Yeon, Ara ; 
  • Jin, Changzhu ; 
  • Park, Wonki ; 
  • Lee, Sung-Chul ; 
  • Choi, Hongsoo
  • 2020-06
  • Shin, Eun Jung. (2020-06). Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film. Micromachines, 11(6), 1–17. doi: 10.3390/mi11060623
  • Multidisciplinary Digital Publishing Institute (MDPI)
  • View : 652
  • Download : 115

Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array

Article
Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array
  • Yeo, Hong Goo ; 
  • Jung, Joontaek ; 
  • Sim, Minkyung ; 
  • Jang, Jae Eun ; 
  • Choi, Hongsoo
  • 2020-01
  • Yeo, Hong Goo. (2020-01). Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array. doi: 10.3390/s20010315
  • MDPI AG
  • View : 788
  • Download : 141
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