DGIST Scholar: 검색

DGIST Scholar

Results 1-2 of 2 (Search time: 0.002 seconds).

Issue Date	Title Author(s) Journal	View
2009	Low Temperature Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and O-2 Eom, Tae-Kwang ; Sari, Windu ; Choi, Kyu-Jeong ; Shin, Woong-Chul ; Kim, Jae Hyun ; Lee, Do-Joong ; Kim, Ki-Bum ; Sohn, Hyunchul ; Kim, Soo-Hyun Electrochemical and Solid State Letters, v.12, no.11, pp.D85 - D88, 2009	588
2009	Low Temperature Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and O-2 Eom, Tae-Kwang ; Sari, Windu ; Choi, Kyu-Jeong ; Shin, Woong-Chul ; Kim, Jae Hyun ; Lee, Do-Joong ; Kim, Ki-Bum ; Sohn, Hyunchul ; Kim, Soo-Hyun Electrochemical and Solid State Letters, v.12, no.11, pp.D85 - D88, 2009	49

DGIST

DGIST Scholar was built with support from the OAK distribution project by the National Library of Korea.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Library Services Team, DGIST 333. Techno Jungang-daero, Hyeonpung-myeon, Dalseong-gun, Daegu, 42988, Republic of Korea.

RSS_1.0 RSS_2.0 ATOM_1.0