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Issue Date	Title Author(s) Journal	View
2017-06-27	Atomic Layer Deposition of ZrO2 thin films Using CpZrNMe23 and Water Lee, Sang Ju ; Lee, Eui Jin ; Sung, Shi Joon ; Kang, Jin-Kyu ; 강고루 ; 윤주영 ; Kim, Dae-Hwan 2017 International Forum on Functional Materials IFFM2017, pp.210, 2017-06-27	27

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