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Park, Jeonhyeong ; Lim, Hyeoncheol ; Ryu, Chae Hyun ; Jung, Soon In ; Jang, Il Ryu ; Kim, Hoe Joon
22nd International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2023, pp.792 - 795, 2023-06-29