Cited time in webofscience Cited time in scopus

Formation of Macropore and Three-Dimensional Nanorod Array in p-Type Silicon

Title
Formation of Macropore and Three-Dimensional Nanorod Array in p-Type Silicon
Author(s)
Kim, Kang-PilLi, ShiqiangLyu, Hong-KunWoo, Sung-HoLim, Sang KyooChang, DaeicOh, Hwa SubHwang, Dae-Kue
Issued Date
2010-05
Citation
Japanese Journal of Applied Physics, v.49, no.5
Type
Article
Keywords
Three-Dimensional StructureAproticAspect RatioChemicals Removal (Water Treatment)Deionized WaterElectrochemical EtchingElectrolyte CompositionsElectrolytesHigh Aspect RatioHydrogen FluorideMacro PoresMacroporous SiMask PatternsMasksN-TYPE SILICONNANOROD ARRAYSNanorodsOptimizationOrganic ElectrolyteP-Type SiliconPhysicsPore Wall ThicknessPorous SiliconThree Dimensional
ISSN
0021-4922
Abstract
We carried out a study on the change in pore wall thickness depending on the current density in p-type silicon. We attempted the formation of a uniform macropore or nanorod array with a high aspect ratio in p-type silicon by electrochemical etching through the optimization of the hydrogen fluoride (HF)/organic electrolyte composition and the design of the mask pattern. The electrochemical etching of p-type silicon in the HF : dimethylsulfoxide (DMSO) : deionized (DI) water 1/4 1 : 5 : 5 electrolyte can control the velocity of a reaction between an electrolyte and a hole necessary for the electrochemical etching of silicon through the mixing of the protic property of DI water and the aprotic property of DMSO. In this study, we fabricated a p-type silicon nanorod array of three-dimensional structures with an approximately 350nm diameter from macroporous Si by applying two-step currents (40 mA, 200 s + 38 mA, 1600 s) to a 1.8 cm2 circular area using an optimized HF : DMSO : DI water 1/4 1 : 5 : 5 electrolyte composition. © 2010 The Japan Society of Applied Physics.
URI
http://hdl.handle.net/20.500.11750/2494
DOI
10.1143/JJAP.49.056503
Publisher
Institute of Physics Publishing
Related Researcher
  • 김강필 Kim, Kang-Pil
  • Research Interests Solar Cells; 태양전지; Photoelectrode; 광전극; Surface Treatment; 표면처리; Nanoparticle Synthesis; 나노입자합성; Device Process; 소자공정
Files in This Item:

There are no files associated with this item.

Appears in Collections:
Division of Energy & Environmental Technology 1. Journal Articles
Division of AI, Big data and Block chain 1. Journal Articles

qrcode

  • twitter
  • facebook
  • mendeley

Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE