Dynamics Analysis of Dual-drive Gantry Stage in Perspective of Task Motion

Abstract

In this paper, the dynamics of the dual-drive gantry stage with mechanical coupling are analyzed. Analysis of the dynamics of the gantry stage from the point of view of the conventional actuator has a significant coupling effect, so the motion of each actuator cannot be separated. On the other hand, in the analysis in terms of task motion, the dynamics of the gantry stage effectively decouple the linear and rotational motions. For this, the actuator-based dynamics are theoretically minimized through singular value decomposition and transformed into a task motion perspective. In addition, it is verified by simulating the frequency response characteristics of how dynamics are affected by changes in the physical environment of the gantry. © 2022 IEEE.