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Issue Date	Title Author(s) Journal	View
2013-01	Atomic Layer Deposition of Ru Thin Films Using a Ru(0) Metallorganic Precursor and O-2 Hong, Tae Eun ; Choi, Sang-Hyeok ; Yeo, Seungmin ; Park, Ji-Yoon ; Kim, Soo-Hyun ; Cheon, Taehoon ; Kim, Hoon ; Kim, Min-Kyu ; Kim, Hyungjun ECS Journal of Solid State Science and Technology, v.2, no.3, pp.P47 - P53, 2013-01	429
2013-11	Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization Yeo, Seungmin ; Choi, Sang-Hyeok ; Park, Ji-Yoon ; Kim, Soo-Hyun ; Cheon, Taehoon ; Lim, Byoung-Yong ; Kim, Sunjung Elsevier BV, 2013-11	592

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