PARTICLE MEASURING DEVICE, AND METHOD FOR MANUFACTURING SAME

Abstract

A particle measuring device, according to the present invention, comprises: a measurement unit comprising first and second electrodes which are patterned on a base formed of a piezoelectric material so as to mutually transmit and receive signals, wherein the measurement unit measures the mass of particles by means of a change in the signals transmitted and received between the first and second electrodes; and an adsorption unit which is provided in an adsorption region provided between the first and second electrodes so as to adsorb fine particles according to a temperature change. According to the present invention, the device has a high adsorption rate and does not interfere with the resonance rate of the piezoelectric material, thereby having excellent particle measurement quality.