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PARTICLE MEASURING DEVICE, AND METHOD FOR MANUFACTURING SAME
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Title
PARTICLE MEASURING DEVICE, AND METHOD FOR MANUFACTURING SAME
Alternative Title
PARTICLE MEASURING APPARATUS AND MANUFACTURING METHOD THEREOF
Country
UN
Application Date
2022-05-02
Application No.
PCT/KR2022/006221
Registration Date
2022-12-22
Publication No.
2022265220
Assignee
DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY,재단법인대구경북과학기술원
URI
https://scholar.dgist.ac.kr/handle/20.500.11750/58708 PCT/KR2022/006221
Abstract
A particle measuring device, according to the present invention, comprises: a measurement unit comprising first and second electrodes which are patterned on a base formed of a piezoelectric material so as to mutually transmit and receive signals, wherein the measurement unit measures the mass of particles by means of a change in the signals transmitted and received between the first and second electrodes; and an adsorption unit which is provided in an adsorption region provided between the first and second electrodes so as to adsorb fine particles according to a temperature change. According to the present invention, the device has a high adsorption rate and does not interfere with the resonance rate of the piezoelectric material, thereby having excellent particle measurement quality.
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Kim, Hoe Joon김회준

Department of Robotics and Mechatronics Engineering

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