Title

반도체 제조공정에서 발생하는 입자 측정을 위한 입자 저감 시스템 및 그 측정 방법

Alternative Title

PARTICLE ABATEMENT SYSTEM FOR PARTICLE MEASUREMENT FROM SEMICONDUCTOR MANUFACTURING PROCESS AND MEASUREMENT METHOD THEREFOR

Country

KO

Application Date

2024-06-18

Application No.

10-2024-0078796

Registration Date

2025-11-24

Publication No.

10-2891767

Assignee

(재)대구경북과학기술원(100/100)

URI

https://scholar.dgist.ac.kr/handle/20.500.11750/59316 10-2024-0078796

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