Study of active-matrix high-power transistor design for electrical stimulation

Abstract

Among various methods for generating artificial tactile sensations, a haptic device that employs electrical stimulation has attracted significant attention due to its high potential for realizing hyper-realistic touch. Considering the high skin impedance and the dense population of tactile receptors in the fingers, achieving a high-resolution electrode design with high-power operation and a flexible form-factor is required. In this study, an electrical stimulation haptic device employing a high-power transistor with an active matrix (AM) design on a flexible substrate was demonstrated. We optimized parameters for the thin-film transistor (TFT) employing Indium-Gallium-Zinc-Oxide (IGZO) to sustain biphasic signal conditions as well as high power driving for electrical stimulation and its compatibility with low-process temperature for flexible form-factor. In order to secure the operating range of the driving TFT, the skin resistance value was measured based on the actual electrical stimulation waveform and confirmed to be 20-30 k Omega on average. The resulting device achieved a spatial resolution of 64 channels within a 1 cm(2) area. To achieve high drain current of TFT, a comb-shaped design of source and drain was suggested. The TFT can transfer high biphasic voltage (similar to +/- 50 V) with high simulation current (>10 mA). Therefore, the electrical stimulation device with high electrode density can supply sufficient power with wide bipolar stimulus signal swings stably for finger skin stimulation and various human interface devices.